JPH02114463U - - Google Patents
Info
- Publication number
- JPH02114463U JPH02114463U JP2416989U JP2416989U JPH02114463U JP H02114463 U JPH02114463 U JP H02114463U JP 2416989 U JP2416989 U JP 2416989U JP 2416989 U JP2416989 U JP 2416989U JP H02114463 U JPH02114463 U JP H02114463U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- elastic member
- polisher
- elasticity
- polishing pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 7
- 229920002379 silicone rubber Polymers 0.000 claims 1
- 239000004945 silicone rubber Substances 0.000 claims 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2416989U JPH02114463U (en]) | 1989-03-02 | 1989-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2416989U JPH02114463U (en]) | 1989-03-02 | 1989-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02114463U true JPH02114463U (en]) | 1990-09-13 |
Family
ID=31243788
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2416989U Pending JPH02114463U (en]) | 1989-03-02 | 1989-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02114463U (en]) |
-
1989
- 1989-03-02 JP JP2416989U patent/JPH02114463U/ja active Pending